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Calibration of Dimensional Standards for Microelectronics Industry Using an Electron Microscope

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High-accuracy calibration of magnification standards and development of linewidth standards

© Tom Radcliffe

High-accuracy calibration of magnification standards and development of linewidth standards for control of dimensional in microelectronics manufacture being carried out with a dimensional-metrology scanning electron microscope (Sam Jones)

Precision Engineering Division

Free use of this photo is restricted to materials that describe NIST programs directly. Copyright is owned by the photographer. To receive an unwatermarked copy of the photo for use describing NIST programs contact Beamie Young. To use the photo as stock photography contact: Point of View Studio, 7002 Carroll Ave., Takoma Park, MD, 20912

 


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