Electromagnetic Scattering |
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How
is electromagnetic scattering used in metrology? |
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The size of microscopic particles
can be determined using laser light, which is a kind of electromagnetic
wave. The roughness of surfaces can affect the result of size
measurements of other objects and is also a limitation in industrial
applications such as the manufacture of optical instruments. Light
is directed towards the microscopic particles or rough surfaces
and the resulting distribution of scattered light is then measured.
These measurements contain the information needed to determine
the size of the particles or the characteristics of the rough
surfaces. The distribution of the light scattered by typical particles
and surfaces is calculated, and this process can be inverted to
determine the properties of the scatterer from the set of measurements. |
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What
theory describes the scattering of light? |
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Electromagnetic scattering is governed
by the partial differential equations known as Maxwell's equations.
These equations can be solved numerically either in their original
form or after they are converted to integral equations. When the
wavelength of the laser light used in the measurements is about
as large as the diameter of the particles or the root-mean-square
roughness of the surface, the exact equations have to be used.
If the wavelength is much larger than the dimensions of the particles
or surface roughness, approximate theories can be used to simplify
the calculations. Both of these situations occur in measurements
carried out in this division. |
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How
are calculations carried out? |
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imple numerical integration can be
used to calculate the light distributions when approximations
are valid. Otherwise, the numerical solution of the Maxwell equations
in integral form is implemented by converting these equations
into linear algebraic equations. Integral equations have some
advantages over differential equations, mainly consisting of the
incorporation of the radiation condition and the flexibility in
the choice of domains of integration. For homogeneous scatterers,
the unknowns for integral equations are located on the interfaces
and do not need to be distributed throughout the volume, greatly
reducing their number. Two-dimensional problems such as monochromatic
plane waves incident on infinite strips on a substrate can be
reduced to the solution of scalar Helmholtz equations. Full three-dimensional
problems are more complicated and calculations are limited by
the memory available on the computers used to solve these problems. |
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Current
Activities |
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Compute the distribution of light
scattered by pigments in rough coatings. Compute the distribution
of light scattered by parallel strips on a substrate. Compare
power spectral densities of surface roughness determined using
a variety of profiling instruments, as well as a light scattering
instrument. |
Technical Contact: Dr. Egon
Marx |
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